Browse "MS-Journal Papers(저널논문)" by Subject Oxygen impurity
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| Low-resistivity ruthenium metal thin films grown via atomic layer deposition using dicarbonyl-bis(5-methyl-2,4-hexanediketonato)ruthenium (II) and oxygen Ko, Eun Chong; Kim, Jae Yeon; Rhee, Hakseung; Kim, Kyung Min; Han, Jeong Hwan, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.156, 2023-03 |
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