Browse "MS-Journal Papers(저널논문)" by Subject Oxygen Diffusion Barrier
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| Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Jeong, Seong-Jun; Kim, Doo-In; Kim, Sang Ouk; Han, Tae Hee; Kwon, Jung-Dae; Park, Jin-Seong; Kwon, Se-Hun, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.11, no.1, pp.671 - 674, 2011-01 |
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