Browse "MS-Journal Papers(저널논문)" by Subject Optical emission spectroscopy

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Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition

Hur, M.; Lee, J. Y.; Kang, W. S.; Lee, J. O.; Song, Y. -H.; Kim, Sang-Joon; Kim, I. D., THIN SOLID FILMS, v.619, pp.342 - 346, 2016-11

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