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Cathodic arc plasma deposition of nano-multilayered Zr-O/Al-O thin films

Kim, Sun Kyu; Van Le, Vinh; Boxman, R. L.; Zhitomirsky, V. N.; Lee, JeongYong, SURFACE COATINGS TECHNOLOGY, v.204, no.11, pp.1697 - 1701, 2010-02

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