Browse "MS-Journal Papers(저널논문)" by Subject Layer-by-layer MOCVD

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Layer-by-Layer Growth of GeSbTe Thin Films by Metal-Organic CVD for Phase Change Memory Applications

Kim, Ran-Young; Kim, Ho Gi; Park, Kyoung-Woo; Ahn, Jun-Ku; Yoon, Soon-Gil, CHEMICAL VAPOR DEPOSITION, v.15, no.10-12, pp.296 - 299, 2009-12

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