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Growth of very large grains in polycrystalline silicon thin films by the sequential combination of vapor induced crystallization using AlCl3 and pulsed rapid thermal annealing Ahn, Kyung-Min; Kang, Seung-Mo; Ahn, Byung-Tae, CURRENT APPLIED PHYSICS, v.12, no.6, pp.1454 - 1458, 2012-11 |
High-Quality Polycrystalline Silicon Film Crystallized from Amorphous Silicon Film using NiCl2 Vapor Kang, Seung-Mo; Ahn, Kyung-Min; Ahn, Byung-Tae, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.159, no.1, pp.29 - 32, 2012 |
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