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Measurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM) Shin, Hyunjung; Lee, Bongki; Kim, Chanhyung; Park, Hongsik; Min, Dong-Ki; Jung, Juwhan; Hong, Seungbum; et al, ELECTRONIC MATERIALS LETTERS, v.1, no.2, pp.127 - 133, 2005-12 |
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