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Browse "MS-Journal Papers(저널논문)" by Subject Interface properties

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1	Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition Lee, Kwang-Man; Kim, Chang Young; Choi, Chi Kyu; Yun, Sang-Won; Ha, Jong-Bong; Lee, Jung-Hee; Lee, JeongYong, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.55, no.3, pp.1153 - 1157, 2009-09

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