Browse "MS-Journal Papers(저널논문)" by Author Yun, Won-Deok
Showing results 1 to 1 of 1
| Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3 Park, Kwangchol; Yun, Won-Deok; Choi, Byoung-Jun; Kim, Heon-Do; Lee, Won-Jun; Rha, Sa-Kyun; Park, Chong-Ook, THIN SOLID FILMS, v.517, no.14, pp.3975 - 3978, 2009-05 |
Discover
Open Access
- 265 OA Article
Date issued
- 1,014 2020 - 2024
- 2,625 2010 - 2019
- 2,168 2000 - 2009
- 1,240 1990 - 1999
- 179 1980 - 1989