Browse "MS-Journal Papers(저널논문)" by Author Yu, HK

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Effects of in-situ RF sputter and conventional HF cleaning on TiSi2 formation

Bae, JU; Lee, JeongYong; Hyeon, YC; Yu, HK; Nam, KS, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.33, pp.117 - 120, 1998-11

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