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Dependence of the properties of (SrxTi1-x)O-3 thin films deposited by plasma-enhanced metal-organic chemical vapor deposition on electron cyclotron resonance plasma Lee, JS; Song, HW; Jun, BH; Kwack, DH; Yu, BG; Jiang, ZT; No, Kwangsoo, THIN SOLID FILMS, v.301, no.1-2, pp.154 - 161, 1997-06 |
Effects of process parameters on titanium dioxide thin film deposited using ECR MOCVD Lee, JS; Song, HW; Lee, WJ; Yu, BG; No, Kwangsoo, THIN SOLID FILMS, v.287, no.1-2, pp.120 - 124, 1996-10 |
Mass spectroscopic study for vaporization characteristics of Ba(TMHD)(2) and Sr(TMHD)(2) in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition Lee, JS; Song, HW; Kim, KS; Yu, BG; Jeong, YH; Jiang, ZT; No, Kwangsoo, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.15, no.1, pp.72 - 76, 1997 |
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