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Formation of a Lead Zirconate Titanate (PZT)/Pt Interfacial Layer and Structural Changes in the Pt/Ti/SiO 2/Si Substrate during the Deposition of PZT Thin Film by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition Chung, Su-Ock; Kim, Jae Whan; Kim, Geun Hong; Park, Chong Ook; Lee, Won Jong, Japanese Journal of Applied Physics, Vol.36, pp.4386-4391, 1997-07-15 |
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