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CHARACTERIZATION OF AZ PN114 RESIST FOR SOFT-X-RAY PROJECTION LITHOGRAPHY

EARLY, K; TENNANT, DM; Jeon, DukYoung; MULGREW, PP; MACDOWELL, AA; WOOD, OR; KUBIAK, GD; et al, APPLIED OPTICS, v.32, no.34, pp.7044 - 7049, 1993-12

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