Browse "MS-Journal Papers(저널논문)" by Author Lim, Jung-Wook

Showing results 1 to 3 of 3

1
Analysis of a transient region during the initial stage of atomic layer deposition

Lim, Jung-Wook; Park, Hyung-Sang; Kang, Sang-Won, JOURNAL OF APPLIED PHYSICS, v.88, no.11, pp.6327 - 6331, 2000-09

2
Kinetic modeling of film growth rates of TiN films in atomic layer deposition

Lim, Jung-Wook; Park, Jin-Seong; Kang, Sang-Won, JOURNAL OF APPLIED PHYSICS, v.87, no.9, pp.4632 - 4634, 2000-05

3
Theoretical evaluation of film growth rate during atomic layer epitaxy

Park, Hyung-Sang; Min, Jae-Sik; Lim, Jung-Wook; Kang, Sang-Won, APPLIED SURFACE SCIENCE, v.158, no.1-2, pp.81 - 91, 1999-12

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