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Large-Area Uniform 1-nm-Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A "Next-Generation" Cu Diffusion Barrier?

Kang, Yun-Ho; Lee, Sangbong; Choi, Youngwoo; Seong, Won Kyung; Han, Kyu Hyo; Kim, Jang Hwan; Kim, Hyun-Mi; et al, ADVANCED MATERIALS, v.34, no.15, 2022-04

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