Browse "MS-Journal Papers(저널논문)" by Author Hong, Seung Bum
Showing results 1 to 3 of 3
| Application of DV-Xa Cluster Method to the Cr-Al Oxide Mask Materials for Deep UV Lithography Jiang, Zhong-Tao; Yamaguchi, Tomuo; Kim, Eunah; Hong, Seung Bum; No, Kwangsoo; Kang, Young Seog; Park, Soon Ja; et al, BULLETIN OF THE SOCIETY FOR DISCRETE VARIATIONAL XA, v.10, no.2, pp.22 - 26, 1997-01 |
| Investigation on Applicability of Chromium Based Materials to Attenuated Phase shift Mask for DUV Exposure Hong, Seung Bum; Kim, Eun Ah; Jiang, Zhong Tao; Bae, Byeong-Soo; No, Kwangsoo; Shin, Woo Suck; Lim, Sung Chul; et al, PROCEEDINGS OF SPIE, v.2793, no.I34, pp.134 - 137, 1996-04 |
| Study on Stability of CrFx Flms for Phase Shifting Mask Kim, Eun Ah; Hong, Seung Bum; Jiang, Zhong Tao; No, Kwangsoo; Lim, Sung Chul; Woo, Sang Gyun; Koh, Young Bum, PROCEEDING OF SPIE, 1997 |
Discover
Open Access
- 265 OA Article
Date issued
- 1,066 2020 - 2024
- 2,625 2010 - 2019
- 2,168 2000 - 2009
- 1,240 1990 - 1999
- 179 1980 - 1989