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Pre-atomic layer deposition surface cleaning and chemical passivation of (100) In(0.2)Ga(0.8)As and deposition of ultrathin Al(2)O(3) gate insulators Shin, Byungha; Choi, Donghun; Harris, James S.; Mclntyre, Paul C., APPLIED PHYSICS LETTERS, v.93, no.5, 2008-08 |
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