Browse "MS-Journal Papers(저널논문)" by Author Cerrina, F

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Sub-50 nm period patterns with EUV interference lithography

Solak, HH; David, C; Gobrecht, J; Golovkina, V; Cerrina, F; Kim, Sang Ouk; Nealey, PF, MICROELECTRONIC ENGINEERING, v.67-8, pp.56 - 62, 2003-06

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