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Negative-Tone Block Copolymer Lithography by In Situ Surface Chemical Modification

Kim, Bong-Hoon; Byeon, Kyeong-Jae; Kim, Juyoung; Kim, Jinseung; Jin, Hyeong Min; Cho, Joong-Yeon; Jeong, Seong-Jun; et al, SMALL, v.10, no.20, pp.4207 - 4212, 2014

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