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Abnormal Silicon Etching Behaviors in Nanometer-Sized Channels Koo, Kunmo; Chang, Joon Ha; Ji, Sanghyeon; Choi, Hyuk; Cho, Seunghee H.; Yoo, Seung Jo; Choe, Jacob; et al, NANO LETTERS, v.24, no.16, pp.4900 - 4907, 2024-04 |
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