Showing results 1 to 2 of 2
Improvement of Surface Morphology of Aluminum Thin Films Grown by Metallorganic Chemical Vapor Deposition Ahn, Seong-Deok; Lee, Hyun-Bae; Kang, Sang-Won, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.3, no.4, pp.186 - 188, 2000-04 |
Surface morphology improvement of metalorganic chemical vapor deposition Al films by layered deposition of Al and ultrathin TiN Ahn, Seong-Deok; Lee, Hyun-Bae; Kang, Sang-Won, JAPANESE JOURNAL OF APPLIED PHYSICS, v.39, no.6A, pp.3349 - 3354, 2000-06 |
Discover