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Thermodynamic and Kinetic Tuning of Block Copolymer Based on Random Copolymerization for High-Quality Sub-6 nm Pattern Formation

Hur, Yoon Hyung; Song, Seung Won; Kim, Jong Min; Park, Woon Ik; Kim, Kwang Ho; Kim, Yong Joo; Jung, Yeon Sik, ADVANCED FUNCTIONAL MATERIALS, v.28, no.28, 2018-07

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