Showing results 1 to 4 of 4
Attenuated phase-shifting masks of chromium aluminum oxide Kim, E; Hong, Daniel Seungbum; Lim, S; Kim, YB; Woo, SG; Kim, DW; No, Kwangsoo, APPLIED OPTICS, v.37, no.19, pp.4254 - 4259, 1998-07 |
Neutral plane control by using polymer/graphene flake composites for flexible displays Hwang, Byungil; Lim, S; Park, M; Han, Seung Min Jane, RSC ADVANCES, v.7, no.14, pp.8186 - 8191, 2017-01 |
Simulation and fabrication of attenuated phase-shifting masks: CrFx Kim, E; Hong, Daniel Seungbum; Kim, KS; Jiang, ZT; Kim, DW; Lim, S; Woo, SG; et al, APPLIED OPTICS, v.36, no.28, pp.7247 - 7256, 1997-10 |
Single-layer halftone phase-shifting masks for DUV microlithography: Optical property simulation and chromium compound film preparation Jiang, ZT; Hong, Daniel Seungbum; Kim, E; Bae, Byeong-Soo; Lim, S; Woo, SG; Koh, YB; et al, APPLIED SURFACE SCIENCE, v.113, pp.680 - 684, 1997-04 |
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