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Platinum hillocks in Pt/Ti film stacks deposited on thermally oxidized Si substrate Kweon, SY; Choi, Si-Kyung; Yeom, SJ; Roh, JS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.10, pp.5850 - 5855, 2001-10 |
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