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Role of postannealing temperature on the microstructure of Al2O3/ZnO thin films grown by atomic layer deposition for TFT applications

Jang, Yong-Woon; Bang, Seok-Hwan; Jeon, Hyeong-Tag; Lee, Jeong-Yong, PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, v.207, no.9, pp.2185 - 2189, 2010-09

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