Browse "MS-Journal Papers(저널논문)" by Subject DC sputtering

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Structural and electrical characteristics of highly textured oxidation-free Ru thin films by DC magnetron sputtering

Tian, HY; Wang, Y; Chan, HLW; Choy, CL; No, Kwangsoo, JOURNAL OF ALLOYS AND COMPOUNDS, v.392, pp.231 - 236, 2005-04

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