Showing results 2 to 3 of 3
Kinetic modeling of film growth rates of TiN films in atomic layer deposition Lim, Jung-Wook; Park, Jin-Seong; Kang, Sang-Won, JOURNAL OF APPLIED PHYSICS, v.87, no.9, pp.4632 - 4634, 2000-05 |
Theoretical evaluation of film growth rate during atomic layer epitaxy Park, Hyung-Sang; Min, Jae-Sik; Lim, Jung-Wook; Kang, Sang-Won, APPLIED SURFACE SCIENCE, v.158, no.1-2, pp.81 - 91, 1999-12 |
Discover