Browse "MS-Journal Papers(저널논문)" by Author Park, Kun-Sik
Showing results 6 to 7 of 7
| Sub-30 nm Gate Template Fabrication for Nanoimprint Lithography Using Spacer Patterning Technology Park, Kun-Sik; Baik, Kyu-Ha; Kim, Dong-Pyo; Woo, Jong-Chang; No, Kwang-Soo; Lee, Ki-Jun; Do, Lee-Mi, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.11, no.2, pp.1625 - 1628, 2011-02 |
| Sub-50 nm Template Fabrications for Nanoimprint Lithography Using Hydrogen Silsesquioxane and Silicon Nitride Shim, Jae-Yeob; Baek, Kyu-Ha; Park, Kun-Sik; Shin, Hong-Sik; No, Kwang-Soo; Lee, Ki-Jun; Do, Lee-Mi, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.10, pp.3628 - 3630, 2010-05 |
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