Browse "MS-Journal Papers(저널논문)" by Author Lim, SC
Showing results 3 to 5 of 5
| Effects of gas ring position and mesh introduction on film quality and thickness uniformity Hong, Daniel Seungbum; Kim, E; Jiang, ZT; Bae, Byeong-Soo; No, Kwangsoo; Lim, SC; Woo, S; et al, MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, v.45, no.1-3, pp.98 - 101, 1997-03 |
| Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography Jiang, ZT; Hong, Daniel Seungbum; Kim, E; Bae, Byeong-Soo; No, Kwangsoo; Hwangbo, CK; Lim, SC; et al, SEMICONDUCTOR SCIENCE AND TECHNOLOGY, v.11, no.10, pp.1450 - 1455, 1996-10 |
| Water-induced degradation of chromium fluoride films Kim, EN; Hong, Daniel Seungbum; Gorman, JD; Lim, SC; Moon, SY; Kim, DW; No, Kwangsoo, THIN SOLID FILMS, v.324, no.1-2, pp.292 - 299, 1998-07 |
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