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Fabrication of excimer laser annealed poly-Si thin film transistor by using an elevated temperature ion shower doping Park, SC; Jeon, DukYoung, THIN SOLID FILMS, v.310, no.1-2, pp.317 - 321, 1997-11 |
High-resolution transmission electron microscopy study of pulsed laser beam crystallized Si thin film: The formation of hexagonal Si and defects Kim, JH; Lee, JeongYong, THIN SOLID FILMS, v.292, no.1-2, pp.313 - 317, 1997-01 |
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