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A Study on the Deposition Mechnaism of SrTiO3 films Grown by ECRMOCVD

No, Kwangsoo; Lee, Joon Sung; Song, Han Wook; Zun, Byung Hyuk; Jiang, Zhang-Tao; Short, Robert; Johnston, Peter; et al, ISPSA, ISPSA, 1996-01-01

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