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An Uitra High Spped ECL-Bipolar CMOS Technology with Silicon Fillet Self-aligned Contacts

Jeon, Duk Young; Liu, TM; Chin, GM; Morris, MD; Archer, VD; Kim, HH; Cerullo, M; et al, Digest of Technical Papers of 1992 Symposium on VLSI Technilogy, pp.30 - 31, 1992

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