Browse "MS-Conference Papers(학술회의논문)" by Author Min Jae-Sik
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| Atomic layer deposition of TiN thin films by sequential introduction of Ti precursor and NH3 Min Jae-Sik; Son Young-Woong; Kang Won-Gu; Kang Sang-Won, Proceedings of the 1998 MRS Spring Symposium, pp.337 - 342, MRS, 1998-04-13 |
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