Browse "MS-Conference Papers(학술회의논문)" by Author Jang, Seong-Soo
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| Diffusion barrier properties of the TiN films prepared by ECR PECVD method. Park, Hye-Lyun; Jang, Seong-Soo; Lee, Won-Jong, Proceedings of the 1998 MRS Spring Symposium, pp.409 - 0, MRS, 1998-04-13 |
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