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Highly stable top gate top contact ITZO TFT deposited by using high density plasma sputtering

Ahn, Jae Han; Lee, Kwang Heum; Do, Jae Chul; Park, Wan Woo; Park, Sang-Hee Ko, 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2016, pp.183 - 184, Institute of Electrical and Electronics Engineers Inc., 2016-07

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