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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.8, no.1, pp.81 - 94, 2011-01 | |
Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms Tonke, Daniel; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04 |
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