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Results 1-5 of 5 (Search time: 0.007 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation

Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.8, no.1, pp.81 - 94, 2011-01

2
Non-product form equilibrium probabilities in a class of two-station closed reentrant queueing networks

Kim, Woo-sung; Morrison, James R., QUEUEING SYSTEMS, v.73, no.3, pp.317 - 339, 2013-03

3
Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms

Tonke, Daniel; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04

4
Feedback Control of Cluster Tools for Regulating Wafer Delays

Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04

5
Controlled Wafer Release in Clustered Photolithography Tools: Flexible Flow Line Job Release Scheduling and an LMOLP Heuristic

Park, Kyungsu; Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.12, no.2, pp.642 - 655, 2015-04

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