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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Scheduling start-up and close-down periods of dual-armed cluster tools with wafer delay regulation Kim, Tae-Kyu; Jung, Chihyun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.50, no.10, pp.2785 - 2795, 2012 | |
Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms Tonke, Daniel; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04 | |
Feedback Control of Cluster Tools for Regulating Wafer Delays Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04 |
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