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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations Yu, Tae Sun; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.15, no.2, pp.705 - 716, 2018-04 | |
Scheduling In-Line Multiple Cluster Tools Kim, Hyunjung; Lee, Jun-Ho; Baik, Sunhee; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.28, no.2, pp.171 - 179, 2015-05 | |
Scheduling Lot Switching Operations for Cluster Tools Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.26, no.4, pp.592 - 601, 2013-11 | |
Scheduling dual-armed cluster tools with cleaning processes Kim, Hee-Jung; Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.51, no.12, pp.3671 - 3687, 2013-06 |
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