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Results 1-2 of 2 (Search time: 0.012 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple Wafer Types With Identical Job Flows

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.3, pp.1058 - 1070, 2019-07

2
Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules

Kim, Hyunjung; Lee, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.2, pp.898 - 907, 2019-04

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