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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Exit Recursion Models of Clustered Photolithography Tools for Fab Level Simulation Park, Jung Yeon; Park, Kyungsu; Morrison, James R., IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.30, no.1, pp.39 - 51, 2017-02 | |
Models of Clustered Photolithography Tools for Fab-Level Simulation: From Affine to Flow Line Park, Jung Yeon; Park, Kyungsu; Morrison, James R., IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.30, no.4, pp.547 - 558, 2017-11 | |
Innovative products and services for sustainable societal development: Current reality, future potential and challenges Kantola, J.; Liu, Y.; Peura, P.; de Leeuw, T.; Zhang, Y.; Naaranoja, M.; Segev, Aviv; Huisingh, D., JOURNAL OF CLEANER PRODUCTION, v.162, pp.S1 - S10, 2017-09 |
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