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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints Lim, Yuchul; Yu, Tae Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.1, pp.392 - 405, 2019-01 | |
Scheduling Dual-Armed Cluster Tools with Chamber Cleaning Operations Yu, Tae Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.1, pp.218 - 228, 2019-01 | |
K-Cyclic Schedules and the Worst-Case Wafer Delay in a Dual-Armed Cluster Tool Roh, Dong-Hyun; Lee, Tae-Gyung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.32, no.2, pp.236 - 249, 2019-05 | |
Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple Wafer Types With Identical Job Flows Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.3, pp.1058 - 1070, 2019-07 |
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