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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended Petri net Kim, JH; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.5, no.3, pp.490 - 503, 2008-07 | |
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01 |
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