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Results 1-2 of 2 (Search time: 0.003 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations

Yu, Tae Sun; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.15, no.2, pp.705 - 716, 2018-04

2
Scheduling dual-armed cluster tools with cleaning processes

Kim, Hee-Jung; Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.51, no.12, pp.3671 - 3687, 2013-06

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