Browse "IE-Journal Papers(저널논문)" by Subject wafer-to-wafer control
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| Robust Relevance Vector Machine with Variational Inference for Improving Virtual Metrology Accuracy Hwang, Sangheum; Jeong, Myong K.; Yum, Bong-Jin, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.27, no.1, pp.83 - 94, 2014-02 |
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