Browse "IE-Journal Papers(저널논문)" by Subject virtual metrology
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| Robust Relevance Vector Machine with Variational Inference for Improving Virtual Metrology Accuracy Hwang, Sangheum; Jeong, Myong K.; Yum, Bong-Jin, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.27, no.1, pp.83 - 94, 2014-02 |
| 유전알고리즘과 커널 부분최소제곱회귀를 이용한 반도체 공정의 가상계측 모델 개발 김보건; 염봉진, 산업공학(IE INTERFACES), v.23, no.3, pp.229 - 238, 2010-09 |
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