Browse "IE-Journal Papers(저널논문)" by Subject quality control
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| Control charts for random and fixed components of variation in the case of fixed wafer locations and measurement positions Kim, KS; Yum, Bong-Jin, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.12, no.2, pp.214 - 228, 1999-05 |
| Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01 |
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