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A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints Lim, Yuchul; Yu, Tae Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.1, pp.392 - 405, 2019-01 |
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01 |
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