Browse "IE-Journal Papers(저널논문)" by Author Lee, Tae-Gyung
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| Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods Lee, Tae-Gyung; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.3, pp.1890 - 1906, 2023-07 |
| K-Cyclic Schedules and the Worst-Case Wafer Delay in a Dual-Armed Cluster Tool Roh, Dong-Hyun; Lee, Tae-Gyung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.32, no.2, pp.236 - 249, 2019-05 |
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