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Analysis of Backward Sequence for Single-Armed Cluster Tools With Processing Time Variations Lee, Jun-Ho; Kim, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.4, pp.2167 - 2174, 2020-10 |
The Impact of Processing Time Variations on Swap Sequence Performance in Dual-Armed Cluster Tools Lee, Jun-Ho; Kim, Hyun-Jung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.4, pp.2668 - 2677, 2023-10 |
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